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<b>Deprecated</b>: Array and string offset access syntax with curly braces is deprecated in <b>/www/wwwroot/zhuzhan/index.php</b> on line <b>395</b><br />-第(53)章節

Deprecated: Array and string offset access syntax with curly braces is deprecated in /www/wwwroot/zhuzhan/index.php on line 395
-第(53)章節

發布日期:2021年01月22日
Deprecated: Array and string offset access syntax with curly braces is deprecated in /www/wwwroot/zhuzhan/index.php on line 395
-第(53)章節
Deprecated: Array and string offset access syntax with curly braces is deprecated in /www/wwwroot/zhuzhan/index.php on line 395
-第(53)章節

SSIII系列直流脈沖磁控濺射電源

SSIII系列直流脈沖磁控濺射電源

規格參數

SSIII系列直流脈沖磁控濺射電源技術規格

SS III系列磁控濺射電源工作于二級高頻變換模式,單極脈沖方式輸出,電源的電流與脈沖寬度獨立調整。脈沖方式工作時,濺射靶工作于高頻率間歇狀態,使靶材表面積累電荷有一定的泄放時間,有利于抑制靶材弧光放電及表面中毒,適用反應濺射膜層。

電源功率范圍

6-120kW

輸入電源

AC380V±10%三相四線制 50-60HZ

輸出方式

脈沖

脈沖寬度

10-90%

輸出電壓

空載1000V[峰值電壓]

輸出特性

恒流/恒功率/恒壓

滅弧時間

≤3μs

輸出穩定率

0.5%

冷卻方式

6-12kW風冷 20-120kW水冷

使用環境

環境溫度 0-40℃
環境濕度 相對濕度≤85%
空氣清潔 無粉塵 無腐蝕性易燃性氣體 通風良好

冷卻水

清潔 不含礦物質及其他可溶性物質
水溫 20-40℃
壓力 0.15±0.05MPa

通訊方式

模擬/RS485/RS232

說明:電源的輸出特性可根據使用需要作相應調整

聯系我們

如您有任何建議 歡迎垂詢

技術支持

方便、快捷、周到的全程服務

唐山標先電子有限公司 地址:河北省唐山市承唐高速遵化南出口物流園區 電話:0315-6028868 / 6028898 公司網址:/>
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